Semiconductor structure and manufacturing method thereof

ABSTRACT

A method of manufacturing a semiconductor structure includes disposing a plurality of devices on a carrier; immersing the plurality of devices into a molding compound to dispose the molding compound between the plurality of devices; and removing the carrier from the plurality of devices and the molding compound, wherein a first surface of the molding compound adjacent to a plurality of active components over the plurality of devices includes a recessed portion recessed from one of first surfaces of the plurality of devices.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application is a divisional application of U.S. patent applicationSer. No. 14/632,371 filed Feb. 26, 2015, which is incorporated herein byreference in its entirety.

BACKGROUND

Electronic equipment using semiconductor devices are essential for manymodern applications. The semiconductor devices are applied for a varietyof high-density electronics applications. With the advancement ofelectronic technology, the electronic equipment is getting morecomplicated with greater functionality and greater amounts of integratedcircuitry, while are becoming increasingly smaller in size. Due to theminiaturized scale of the electronic equipment, various types anddimensions of semiconductor devices performing different functionalitiesare integrated and packaged into a single module. Furthermore, numerousmanufacturing operations are implemented for integration of varioustypes of semiconductor devices.

However, the manufacturing and integration of the semiconductor devicesinvolve many complicated steps and operations. The integration of thesemiconductor devices in such low profile and high density becomes morecomplicated. An increase in a complexity of manufacturing andintegration of the semiconductor devices may cause deficiencies such ascontamination, poor electrical interconnection, development of cracks,delamination of the components or high yield loss.

The semiconductor devices are integrated and produced in an undesiredconfiguration, which would further exacerbate materials wastage and thusincrease the manufacturing cost. Since more different components withdifferent materials are involved, complexity of the manufacturing andintegration operations of the semiconductor devices is increased. Thereare more challenges to modify a structure of the semiconductor deviceand improve the manufacturing operations. As such, there is a continuousneed to improve the manufacturing the semiconductor devices and solvethe above deficiencies.

BRIEF DESCRIPTION OF THE DRAWINGS

Aspects of the present disclosure are best understood from the followingdetailed description when read with the accompanying figures. It isemphasized that, in accordance with the standard practice in theindustry, various features are not drawn to scale. In fact, thedimensions of the various features may be arbitrarily increased orreduced for clarity of discussion.

FIG. 1 is a schematic view of a semiconductor structure in accordancewith some embodiments of the present disclosure.

FIG. 2 is a schematic view of a semiconductor structure in accordancewith some embodiments of the present disclosure.

FIG. 3 is a schematic view of a semiconductor structure in accordancewith some embodiments of the present disclosure.

FIG. 4 is a schematic view of a semiconductor structure in accordancewith some embodiments of the present disclosure.

FIG. 5 is a flow diagram of a method of manufacturing a semiconductorstructure in accordance with some embodiments of the present disclosure.

FIG. 5A is a schematic view of several devices disposed on a carrier inaccordance with some embodiments of the present disclosure.

FIG. 5B is a schematic view of a metallic shield disposed on a carrierin accordance with some embodiments of the present disclosure.

FIG. 5C is a schematic view of immersion molding operations inaccordance with some embodiments of the present disclosure.

FIG. 5D is a schematic view of a molding in accordance with someembodiments of the present disclosure.

FIG. 5E is a schematic view of a recessed portion of a molding inaccordance with some embodiments of the present disclosure.

FIG. 6 is a flow diagram of a method of manufacturing a semiconductorstructure in accordance with some embodiments of the present disclosure.

FIG. 6A is a schematic view of a wafer including several chips inaccordance with some embodiments of the present disclosure.

FIG. 6B is a schematic view of several chips singulated from a wafer inaccordance with some embodiments of the present disclosure.

FIG. 6C is a schematic view of several devices disposed on a carrier inaccordance with some embodiments of the present disclosure.

FIG. 6D is a schematic view of a metallic shield disposed on a carrierin accordance with some embodiments of the present disclosure.

FIG. 6E is a schematic view of immersion molding operations inaccordance with some embodiments of the present disclosure.

FIG. 6F is a schematic view of a molding in accordance with someembodiments of the present disclosure.

FIG. 6G is a schematic view of a recessed portion of a molding inaccordance with some embodiments of the present disclosure.

FIG. 6H is a schematic view of a recessed portion of a molding inaccordance with some embodiments of the present disclosure.

FIG. 6I is a schematic view of a redistribution layer (RDL) inaccordance with some embodiments of the present disclosure.

FIG. 6J is a schematic view of a ground second surface of a molding inaccordance with some embodiments of the present disclosure.

FIG. 6K is a schematic view of a metallic coating in accordance withsome embodiments of the present disclosure.

FIG. 6L is a schematic view of several semiconductor structuresneighbored with each other in accordance with some embodiments of thepresent disclosure.

FIG. 6M is a schematic view of a semiconductor structure in accordancewith some embodiments of the present disclosure.

DETAILED DESCRIPTION OF THE DISCLOSURE

The following disclosure provides many different embodiments, orexamples, for implementing different features of the provided subjectmatter. Specific examples of components and arrangements are describedbelow to simplify the present disclosure. These are, of course, merelyexamples and are not intended to be limiting. For example, the formationof a first feature over or on a second feature in the description thatfollows may include embodiments in which the first and second featuresare formed in direct contact, and may also include embodiments in whichadditional features may be formed between the first and second features,such that the first and second features may not be in direct contact. Inaddition, the present disclosure may repeat reference numerals and/orletters in the various examples. This repetition is for the purpose ofsimplicity and clarity and does not in itself dictate a relationshipbetween the various embodiments and/or configurations discussed.

Further, spatially relative terms, such as “beneath,” “below,” “lower,”“above,” “upper” and the like, may be used herein for ease ofdescription to describe one element or feature's relationship to anotherelement(s) or feature(s) as illustrated in the figures. The spatiallyrelative terms are intended to encompass different orientations of thedevice in use or operation in addition to the orientation depicted inthe figures. The apparatus may be otherwise oriented (rotated 90 degreesor at other orientations) and the spatially relative descriptors usedherein may likewise be interpreted accordingly.

An electronic equipment including various semiconductor devices ismanufactured by a number of operations. During the manufacturing, thesemiconductor devices with different functionalities and dimensions areintegrated into a single system. Circuitries of the semiconductordevices are integrated and connected through conductive traces and asubstrate. After integration of the semiconductor devices, thesemiconductor devices are encapsulated by a mold in order to protect thesemiconductor devices from damages of the circuitries and environmentalcontamination. However, the encapsulation of the semiconductor devicescould not provide sufficient protection to the semiconductor devicesinvolving different dimensions and materials. The contamination of thesemiconductor devices and delamination of components are suffered.

Further, the semiconductor devices may include some radio frequency (RF)components which require isolation from external electromagneticinterference. Also, the semiconductor device with RF components has toprevent a leakage of RF signals generated by the RF components out ofthe semiconductor device. A shielding is provided for isolating thesemiconductor devices and preventing external interference and signalleakage. However, the semiconductor devices with the shielding could notbe encapsulated in a desired configuration, as the shielding wouldaffect a formation of the encapsulation. As a result, the semiconductordevices could not receive optimal physical protection from theencapsulation and the isolation from external electromagneticinterference by the shielding.

In the present disclosure, an improved semiconductor structure isdisclosed. The semiconductor structure includes several devices and ametallic shield configured to isolate the devices from each other andexternal electromagnetic interference. At least one of the devices hasdifferent height or thickness from another one of the devices. Thedevices are supported by a molding formed by immersion moldingoperations. The devices are dipped into a mold chase containing moldingcompound, and then the molding is formed around and interposed betweenthe devices. The devices are supported by the molding, as such a carrieror a substrate for supporting the devices are not required forintegration of the devices, and thus material cost could be saved.

Furthermore, a metallic shield is included in the semiconductorstructure for isolating the devices. The profile of the metallic shieldwould obstruct filling of molding compound during transfer moldingoperations or compression molding operations. As a result, a moldingencapsulating the devices and the metallic shield could not be formed ina desired configuration by transfer molding operations or compressionmolding operations. In the present disclosure, the molding formed by theimmersion molding operations would not be affected by profiles of thedevices and the metallic shield, and thus the devices could be fullyembedded by the molding, while the metallic shield could provideisolation to each device from electromagnetic interference.

In addition, during manufacturing operations of the semiconductorstructure, a sacrificial layer is disposed on an active side of at leastone of the devices before attaching the devices on a carrier. Thesacrificial layer is configured to cover active components such as diepads on the at least one of the devices during formation of the molding.When the sacrificial layer is then removed after the formation of themolding, the devices are disposed at a substantially same level as eachother. Therefore, some operations such as grinding on the active side,disposition of pillars or bumps on the die pads, etc. could be omittedto save manufacturing cost.

FIG. 1 is an embodiment of a semiconductor structure 100. Thesemiconductor structure 100 includes several devices (101, 102, 103) anda molding 104. Although only three devices (101, 102, 103) are describedbelow and are illustrated in figures, it is not intended to limit tothree devices. Any number of devices is also fallen into our intendedscope, without departing from the spirit and scope of the presentdisclosure.

In some embodiments, the devices (101, 102, 103) are integrated orpackaged to become the semiconductor structure 100. In some embodiments,the semiconductor structure 100 is a system in package (SiP). Thedevices (101, 102, 103) are electrically connected. In some embodiments,the devices (101, 102, 103) include RF components and are integrated tobecome a radio frequency (RF) package.

In some embodiments, the semiconductor structure 100 includes a frontside 100 a and a back side 100 b opposite to the front side 100 a. Insome embodiments, the front side 100 a is processed for routingcircuitry within the semiconductor structure 100. In some embodiments,the back side 100 b does not involve the routing of the circuitry withinthe semiconductor structure 100.

In some embodiments, the devices (101, 102, 103) are horizontallydisposed or vertically stacked. In some embodiments, the devices (101,102, 103) involve different functionalities from each other. Forexample, the devices (101, 102, 103) include a processor, a flashmemory, a resistor, a capacitor, etc. In some embodiments, the devicesinclude at least one unpackaged device and at least one packaged device.In some embodiments, the device 101 is the unpackaged device such as adie or a chip. In some embodiments, the devices 102 and 103 are packageddevices.

In some embodiments, the devices (101, 102, 103) include a bare chip, adie, a ball grid array (BGA) package, a quad flat no leads (QFN)package, a land grid array (LGA) package, a surface mount device (SMD),a microelectromechanical systems device (MEMS), etc. In someembodiments, the device 101 is the chip, the device 102 is the SMD, andthe device 103 is the BGA, QFN or LGA package. In some embodiments, thedevice 101 is the chip which is a small piece including semiconductormaterials such as silicon and is fabricated with a predeterminedfunctional circuit therein produced by photolithography operations. Insome embodiments, the device 101 is singulated from a silicon wafer by amechanical or laser blade. In some embodiments, the device 101 is in aquadrilateral, a rectangular or a square shape.

In some embodiments, the devices (101, 102, 103) have differentdimensions from each other. In some embodiments, at least one of thedevices (101, 102, 103) has substantially different height from anotherone of the devices (101, 102, 103). In some embodiment, the device 101has substantially smaller height than a height of the device 102 or aheight of the device 103.

In some embodiments, each of the devices (101, 102, 103) includes afirst surface (101 a, 102 a, 103 a). Each of the first surfaces (101 a,102 a, 103 a) is disposed with several active components such as diepads, I/O pads, bond pads, conductive traces, conductive structures etc.In some embodiments, the first surface 101 a of the device 101 isdisposed with several die pads 101 b. The first surface 102 a of thedevice 102 is disposed with several conductive structures 102 b. Thefirst surface 103 a of the device 103 is disposed with severalconductive structures 103 b. In some embodiments, the first surfaces(101 a, 102 a, 103 a) are active surfaces of the devices (101, 102, 103)respectively. Each active surface of the devices (101, 102, 103)includes an active component.

In some embodiments, the die pads 101 b are disposed on the firstsurface 101 a of the device 101. In some embodiments, the die pad 101 bis configured to electrically connect with a circuitry external to thedevice 101, so that a circuitry internal to the device 101 electricallyconnects with the circuitry external to the device 101 through the diepad 101 b. In some embodiments, the die pad 101 b includes gold, silver,copper, nickel, tungsten, aluminum, palladium and/or alloys thereof.

In some embodiments, each of the devices (101, 102, 103) includes asecond surface (101 c, 102 c, 103 c) which is opposite to thecorresponding first surface (101 a, 102 a, 103 a). In some embodiments,the second surfaces (101 c, 102 c, 103 c) are back sides of the devices(101, 102, 103) respectively. Each back side of the devices (101, 102,103) does not include active component.

In some embodiments, the molding 104 is disposed between the devices(101, 102, 103) and surrounds the devices (101, 102, 103). Sidewalls ofthe devices (101, 102, 103) are interfaced with the molding 104. In someembodiments, the devices (101, 102, 103) are horizontally arranged andsupported by the molding 104.

In some embodiments, the molding 104 includes a molding compound. Themolding compound can be a single layer film or a composite stack. Themolding compound includes various materials, for example, one or more ofepoxy resins, phenolic hardeners, silicas, catalysts, pigments, moldrelease agents, and the like. Each of the materials for forming amolding compound has a high thermal conductivity, a low moistureabsorption rate, a high flexural strength at board-mountingtemperatures, or a combination of these.

In some embodiments, the molding 104 includes a first surface 104 a. Insome embodiments, the first surface 104 a includes a recessed portion104 b recessed from one of the first surfaces (101 a, 102 a, 103 a) ofthe devices (101, 102, 103). In some embodiments, the recessed portion104 b surrounds the device 101. In some embodiments, the recessedportion 104 b is disposed between the devices (101, 102, 103).

In some embodiments, a level of the recessed portion 104 b of themolding 104 is substantially lower than a level of the one of the firstsurfaces (101 a, 102 a, 103 a) of the devices (101, 102, 103). In someembodiments, the recessed portion 104 b of the molding 104 issubstantially greater than about 5 μm recessed from the one of the firstsurfaces (101 a, 102 a, 103 a) of the devices (101, 102, 103). In someembodiments, the recessed portion 104 b adjacent to a peripheral of oneof the devices (101, 102, 103) is in a curved or a steppedconfiguration.

In some embodiments, the recessed portion 104 b is about 3 μm to about50 μm recessed from the one of the first surfaces (101 a, 102 a, 103 a)of the devices (101, 102, 103). In some embodiments, the recessedportion 104 b is about 5 μm to about 15 μm recessed from the one of thefirst surfaces (101 a, 102 a, 103 a) of the devices (101, 102, 103).

In some embodiments, the recessed portion 104 b disposed adjacent to thedevice 101 is recessed from the first surface 101 a of the device 101.In some embodiments, the recessed portion 104 b disposed adjacent to thedevice 101 is substantially greater than about 5 μm recessed from thefirst surface 101 a of the device 101. In some embodiments, the recessedportion 104 b disposed adjacent to the device 101 is about 3 μm to about20 μm recessed from the first surface 101 a of the device 101.

In some embodiments, the recessed portion 104 b includes severalsections (104 b-1, 104 b-2, 104 b-3, 104 b-4) recessed from one of thedevices (101, 102, 103) and disposed at levels different from eachother. For example, a section 104 b-3 is at a level different fromanother section 104 b-1. In some embodiments, the sections (104 b-1, 104b-2, 104 b-3, 104 b-4) are disposed at substantially same level as eachother. In some embodiments, a vertical distance between the section (104b-1 or 104 b-2) surrounding the device 101 and the first surface 101 aof the device 101 is substantially smaller than or equal to a verticaldistance between the section (104-3 or 104 b-4) surrounding the device(102 or 103) and the first surface (102 a or 103 a) of the device (102or 103).

FIG. 2 is an embodiment of a semiconductor structure 200. Thesemiconductor structure 200 includes several devices (101, 102, 103) anda molding 104 which have similar configurations as in FIG. 1. In someembodiments, the devices (101, 102, 103) are integrated or packaged tobecome the semiconductor structure 200. In some embodiments, thesemiconductor structure 200 is a system in package (SiP). In someembodiments, the devices (101, 102, 103) include RF components and areintegrated to become a radio frequency (RF) package.

In some embodiments, a redistribution layer (RDL) 105 is disposed overthe devices (101, 102, 103) and the molding 104. In some embodiments, aredistribution layer (RDL) 105 is disposed over first surfaces (101 a,102 a, 103 a) of the devices (101, 102, 103) and a first surface 104 aof the molding 104. In some embodiments, the RDL 105 is an electricalconnection to and/or between the devices (101, 102, 103) and circuitryexternal to the devices (101, 102, 103). The RDL 105 re-routes a path ofa circuit from a die pad 101 b or conductive structures 102 b, 103 b tothe circuitry external to the devices (101, 102, 103). In someembodiments, the RDL 105 is a post passivation interconnect (PPI) whichis a conductive interconnect structure on a passivation layer disposedover the first surfaces (101 c, 102 c, 103 c) of the devices (101, 102,103). In some embodiments, a bond pad 115 is disposed over andelectrically connected to the RDL 105. In some embodiments, the bond pad115 is a land grid array (LGA) pad configured to be mounted on a printcircuit board (PCB). In some embodiments, the bond pad 115 is a ballgrid array (BGA) pad configured to receive a conductive bump.

In some embodiments, the conductive interconnect structure includesmaterial such as gold, silver, copper, nickel, tungsten, aluminum,and/or alloys thereof. In some embodiments, the conductive interconnectstructure includes a seed layer and a metal layer which are disposed ina sequence. In some embodiments, the conductive interconnect structureof the RDL 105 interconnects the active components disposed on the firstsurfaces (101 a, 102 a, 103 a) of the devices (101, 102, 103). In someembodiments, the RDL 105 integrates the circuitries of the devices (101,102, 103).

In some embodiments, the RDL 105 is disposed over the first surfaces(101 a, 102 a, 103 a) of the devices (101, 102, 103) and the firstsurface 104 a of the molding 104. The RDL 105 includes a conductiveinterconnect structure 105 a contacted with the die pad 101 b of thedevice 101. In some embodiments, the conductive interconnect structure105 a of the RDL 105 is directly contacted with the die pad 101 b of thedevice 101. A conductive pillar or bump is not included. The conductivepillar or bump does not form or dispose over the die pad 101 b and thusmanufacturing cost could be saved.

FIG. 3 is an embodiment of a semiconductor structure 300. Thesemiconductor structure 300 includes several devices (101, 102, 103) anda molding 104 which have similar configurations as in FIG. 1 or 2. Insome embodiments, the devices (101, 102, 103) are integrated or packagedto become the semiconductor structure 300. In some embodiments, thesemiconductor structure 300 is a system in package (SiP). In someembodiments, the devices (101, 102, 103) include RF components and areintegrated to become a radio frequency (RF) package.

In some embodiments, the semiconductor structure 300 includes a metallicshield 106 disposed within the molding 104 and between the devices (101,102, 103). In some embodiments, the metallic shield 106 is extendedbetween an active side 300 a and a back side 300 b of the semiconductorstructure 300. In some embodiments, the metallic shield 106 is extendedfrom a first surface 104 a to a second surface 104 c of the molding 104.In some embodiments, the metallic shield 106 is vertically disposedalong a height of the semiconductor structure 300 and is extended alonga length of the semiconductor structure 300. In some embodiments, themetallic shield 106 is supported by the molding 104. In someembodiments, the metallic shield 106 includes copper, aluminum, lead,solder, etc.

In some embodiments, the metallic shield 106 isolates the devices (101,102, 103) from each other. In some embodiments, the metallic shield 106defines several compartments to surround one of the devices (101, 102,103) correspondingly. The metallic shield 106 is configured to preventleakage of signal generated from the devices (101, 102, 103) andexternal electromagnetic interference to the devices (101, 102, 103).Therefore, performance of the devices (101, 102, 103) would not beaffected by external environment.

In some embodiments, the semiconductor structure 300 includes a metalliccoating 107 covering second surfaces (101 c, 102 c, 103 c) of thedevices (101, 102, 103) and a second surface 104 c of the molding 104.The second surfaces (101 c, 102 c, 103 c) of the devices (101, 102, 103)are opposite to the first surfaces (101 a, 102 a, 103 a) of the devices(101, 102, 103) correspondingly, and the second surface 104 c of themolding 104 is opposite to the first surface 104 a of the molding 104.

In some embodiments, the metallic coating 107 covers the back side 300 bof the semiconductor structure 300. In some embodiments, the metalliccoating 107 is configured to prevent leakage of signal generated fromthe devices (101, 102, 103) and external electromagnetic interference tothe devices (101, 102, 103). In some embodiments, the metallic coating107 includes copper, aluminum, lead, etc. In some embodiments, themetallic coating 107 contacts with the metallic shield 106. In someembodiments, the metallic coating 107 and the metallic shield 106include same material.

FIG. 4 is an embodiment of a semiconductor structure 400. Thesemiconductor structure 400 includes several devices (101, 102, 103) anda molding 104 which have similar configurations as in FIG. 1, 2 or 3. Insome embodiments, the devices (101, 102, 103) are integrated or packagedto become the semiconductor structure 400. In some embodiments, thesemiconductor structure 400 is a system in package (SiP). In someembodiments, the devices (101, 102, 103) include RF components and areintegrated to become a radio frequency (RF) package.

In some embodiments, a first interface 108 between the RDL 105 and themolding 104 is recessed from a second interface 109 between the RDL 105and the devices (101, 102, 103). In some embodiments, a level of thefirst interface 108 is substantially greater than about 5 μm differentfrom a level of the second interface 109. In some embodiments, the levelof the first interface 108 is about 3 μm to about 30 μm different fromthe level of the second interface 109. In some embodiments, the level ofthe first interface 108 is about 5 μm to about 15 μm different from thelevel of the second interface 109.

In some embodiments, the first interface 108 includes several sections(108-1, 108-2, 108-3). In some embodiments, one of the sections (108-1,108-2, 108-3, 108-4) is at a level different from a level of another oneof the sections (108-1, 108-2, 108-3, 108-4). In some embodiments, thesections (108-1, 108-2, 108-3) are at substantially same level as eachother.

In some embodiments, the second interface 109 includes several sections(109-1, 109-2, 109-3). In some embodiments, one of the sections (109-1,109-2, 109-3) is at a level different from a level of another one of thesections (109-1, 109-2, 109-3). In some embodiments, the sections(109-1, 109-2, 109-3) are at substantially same level as each other.

In some embodiments, one of the sections (108-1, 108-2) of the firstinterface 108 is recessed from the section 109-1 of the second interface109. In some embodiments, one of the sections (108-2, 108-2) of thefirst interface 108 is recessed from the section 109-2 of the secondinterface 109. In some embodiments, one of the sections (108-3, 108-4)of the first interface 108 is recessed from the section 109-3 of thesecond interface 109.

In some embodiments, a molding 104 is disposed between the devices (101,102, 103), and a RDL 105 is disposed over the devices (101, 102, 103)and the molding 104. In some embodiments, the semiconductor structure400 includes a metallic frame 110 disposed within the molding 104 andbetween the devices (101, 102, 103). In some embodiments, the metallicframe 110 covers a back side 400 b of the semiconductor structure 400and isolates the devices (101, 102, 103) from each other. In someembodiments, a bond pad 115 is disposed over and electrically connectedto the RDL 105. In some embodiments, the bond pad 115 is a land gridarray (LGA) pad configured to be mounted on a print circuit board (PCB).In some embodiments, the bond pad 115 is a ball grid array (BGA) padconfigured to receive a conductive bump.

In some embodiments, the metallic frame 110 is electrically connected tothe RDL 105. In some embodiments, the metallic frame 110 is contactedwith a conductive interconnect structure of the RDL 105. In someembodiments, the metallic frame 110 includes a metallic shield 106extending between an active side 400 a and the back side 400 b of thesemiconductor structure 400, and a metallic coating 107 covering theback side 400 b of the semiconductor structure 400. In some embodiments,the metallic shield 106 contacts with the conductive interconnectstructure of the RDL 105.

In addition, as illustrated in FIGS. 1-4, none of the semiconductorstructures (100, 200, 300, 400) includes a substrate or a carrier forsupporting the devices (101, 102, 103). As a result, a material cost anda manufacturing cost of the substrate or carrier could be saved.Furthermore, the device 101 does not include pillar or bump on the diepad 101 b, which could also save material and manufacturing cost.

In the present disclosure, a method of manufacturing a semiconductorstructure is also disclosed. In some embodiments, a semiconductorstructure is formed by a method 500. The method 500 includes a number ofoperations and the description and illustration are not deemed as alimitation as the sequence of the operations.

FIG. 5 is an embodiment of a method 500 of manufacturing a semiconductorstructure. The method 500 includes a number of operations (501, 502, 503and 504).

In operation 501, several devices (101, 102, 103) are disposed on acarrier 111 as shown in FIG. 5A. In some embodiments, the carrier 111includes glass or silicon. In some embodiments, the devices (101, 102,103) are temporarily attached to the carrier 111. In some embodiments,first surfaces (101 a, 102 a, 103 a) of the devices (101, 102, 103) areattached to the carrier 111 by an adhesive 111 a such as a glue, a dieattach film (DAF), or etc. In some embodiments, second surfaces (101 c,102 c, 103 c) of the devices (101, 102, 103) are opposite to firstsurfaces (101 a, 102 a, 103 a) of the devices (101, 102, 103)respectively.

In some embodiments, the devices (101, 102, 103) include a packageddevice and a unpackaged device. In some embodiments, the device 101 is adie or a chip. In some embodiments, the device 102 is a surface mountdevice (SMD). In some embodiments, the device 103 is a ball grid array(BGA) package, quad flat no lead (QFN) package, land grid array (LGA)package or other kinds of packages. In some embodiments, the devices(101, 102, 103) have similar configuration as in FIGS. 1-4.

In some embodiments, each of first surfaces (101 a, 102 a, 103 a) of thedevices (101, 102, 103) includes several active components thereon. Insome embodiments, the first surface 101 a of the device 101 includes adie pad 101 b. The die pad 101 b is configured to connect a circuitrywithin the device 101 with an external circuitry.

In operation 502, a metallic shield 106 is disposed on the carrier 111and between the devices (101, 102, 103) as shown in FIG. 5B. In someembodiments, the metallic shield 106 is disposed to surround each of thedevices (101, 102, 103). The metallic shield 106 is configured toisolate the devices (101, 102, 103) from each other, prevent externalelectromagnetic interference to the devices (101, 102, 103) and preventleakage of signals generated from the devices (101, 102, 103). In someembodiments, the metallic shield 106 is disposed upright to the carrier111. In some embodiments, the metallic shield 106 has similarconfiguration as in FIGS. 1-4.

In operation 503, the devices (101, 102, 103) and the metallic shield106 are immersed into a molding compound to dispose the molding compoundbetween the devices (101, 102, 103) as shown in FIG. 5C. In someembodiments, the molding compound is contained in a mold case 112, andthe devices (101, 102, 103) and the metallic shield 106 are flipped andimmersed into the molding compound. A molding 104 including the moldingcompound and encapsulating the devices (101, 102, 103) and the metallicshield 106 is formed by the immersion molding operations. The devices(101, 102, 103) and the metallic shield 106 are withdrawn out of themold chase 112 when the molding 104 is formed as shown in FIG. 5D.

In operation 504, the carrier 112 is removed from the devices (101, 102,103) and the molding compound or the molding 104 as shown in FIG. 5E.The carrier 112 is removed from first surfaces (101 a, 102 a, 103 a) ofthe devices (101, 102, 103) and a first surface 104 a of the molding104. When the carrier 112 is removed, the first surfaces (101 a, 102 a,103 a) of the devices (101, 102, 103) and some portions of the metallicshield 106 are exposed from the molding 104.

In some embodiments, the first surface 104 a of the molding 104 adjacentto active components such as die pad 101 b, conductive structure (102 bor 103 b), etc. includes a recessed portion 104 b recessed from one ofthe first surfaces (101 a, 102 a, 103 a) of the devices (101, 102, 103).When the carrier 112 is removed from the devices (101, 102, 103) and themolding 104, the recessed portion 104 b is formed.

Since the adhesive 111 a on the carrier 111 is flexible and soft, thefirst surfaces (101 a, 102 a, 103 a) of the devices (101, 102, 103)would be slightly recessed into the adhesive 111 a when disposing on thecarrier 111. As a result, the recessed portion 104 b of the molding 104is formed. A stepped configuration between peripherals of first surfaces(101 a, 102 a, 103 a) of the devices (101, 102, 103) and the firstsurface 104 a of the molding 104 is formed. In some embodiments, therecessed portion 104 b is recessed greater than about 5 μm from one ofthe first surfaces (101 a, 102 a, 103 a) of the devices (101, 102, 103).

In some embodiments, a semiconductor structure is formed by a method600. The method 600 includes a number of operations and the descriptionand illustration are not deemed as a limitation as the sequence of theoperations.

FIG. 6 is an embodiment of a method 600 of manufacturing a semiconductorstructure. The method 600 includes a number of operations (601, 602,603, 604, 605, 606, 607, 608, 609, 610 and 611).

In operation 601, a sacrificial layer 113 b is disposed on a firstsurface 101 a of the device 101 as shown in FIG. 6A. In someembodiments, the sacrificial layer 113 b includes epoxy, polyamide,polybenzoxazole (PBO) or etc. In some embodiments, the sacrificial layer113 b is configured to protect the first surface 101 a or activecomponents such as a die pad 101 b on the first surface 101 a. In someembodiments, a wafer 113 includes several devices 101. The devices 101are separated from each other by several scribe line regions 113 a. Insome embodiments, the wafer 113 is a silicon wafer. In some embodiments,the device 101 is a die or a chip including a circuitry. In someembodiments, several active components 101 b are disposed on the firstsurface 101 a of the device 101.

In operation 602, the devices 101 are singulated from the wafer 113 asshown in FIG. 6B. The wafer 113 is singulated into several individualdevices 101 along the scribe line regions 113 a (referring to FIG. 6A).In some embodiments, the wafer 113 is singulated by a mechanical orlaser blade. The sacrificial layer 113 b is disposed on the firstsurface 101 a of the device 101.

In operation 603, several devices (101, 102, 103) are disposed on acarrier 111 as shown in FIG. 6C. In some embodiments, the device 101singulated from the wafer 113 (referring to FIG. 6A) and the devices(102, 103) are disposed on the carrier 111. In some embodiments, firstsurfaces (101 a, 102 a, 103 a) of the devices (101, 102, 103) areattached to the carrier 111 by an adhesive 111 a. In some embodiments,the sacrificial layer 113 b of the device 101 is slightly inserted intothe adhesive 111 a, since the adhesive 111 a is flexible and soft. Insome embodiments, the operation 603 is similar to the operation 501 asshown in FIG. 5A.

In operation 604, a metallic shield 106 is disposed on the carrier 111as shown in FIG. 6D. In some embodiments, the metallic shield 106 isdisposed between the devices (101, 102, 103), such that the devices(101, 102, 103) are isolated from each other. In some embodiments, theoperation 604 is similar to the operation 502 as shown in FIG. 5B.

In operation 605, the devices (101,102,103) and the metallic shield 106are immersed into a molding compound to dispose the molding compoundbetween the devices (101, 102, 103) as shown in FIG. 6E. In someembodiments, the molding compound is contained in a mold case 112, andthe devices (101, 102, 103) and the metallic shield 106 are flipped andimmersed into the molding compound. A molding 104 including the moldingcompound and encapsulating the devices (101, 102, 103) and the metallicshield 106 is formed by the immersion molding operations. In someembodiments, the operation 605 is similar to the operation 503 as shownin FIG. 5C. The devices (101, 102, 103) and the metallic shield 106 arewithdrawn out of the mold chase 112 when the molding 104 is formed asshown in FIG. 6F.

In operation 606, the carrier 111 (referring to FIG. 6F) is detached andremoved from the devices (101, 102, 103) and the molding 104 as shown inFIG. 6G. The molding 104 surrounds and supports the devices (101, 102,103) and the metallic shield 106. In some embodiments, the carrier 111is detached from the first surfaces (101 a, 102 a, 103 a) of the devicesand the first surface 104 a of the molding 104. In some embodiments, arecessed portion 104 b is formed when the carrier 111 is detached fromthe devices (101, 102, 103) and the molding 104.

In operation 607, the sacrificial layer 113 b (referring to FIG. 6G) isremoved from the first surface 101 a of the device 101 as shown in FIG.6H. In some embodiments, the sacrificial layer 113 b is removed from thefirst surface 101 a by etching operations. When the carrier 111 and thesacrificial layer 113 b are removed, the recessed portion 104 b isformed. The recessed portion 104 b is recessed from one of the firstsurfaces (101 a, 102 a, 103 a) of the devices (101, 102, 103).

In some embodiments, the recessed portion 104 b is recessed greater thanabout 5 μm from one of the first surfaces (101 a, 102 a, 103 a) of thedevices (101, 102, 103). In some embodiments, the recessed portion 104 bincludes several sections (104 b-1, 104 b-2, 104 b-3, 104 b-4) recessedfrom one of the devices (101, 102, 103) and disposed at levels differentfrom each other. For example, a section 104 b-3 is at a level differentfrom another section 104 b-1. In some embodiments, the sections (104b-1, 104 b-2, 104 b-3) are formed at a level different from each otherafter the operation 606 or after the operation 607. In some embodiments,a vertical distance between the section (104 b-1 or 104 b-2) surroundingthe device 101 and the first surface 101 a of the device 101 issubstantially smaller than or equal to a vertical distance between thesection (104-3 or 104 b-4) surrounding the device (102 or 103) and thefirst surface (102 a or 103 a) of the device (102 or 103).

In operation 608, a redistribution layer (RDL) 105 is formed on thefirst surfaces (101 a, 102 a, 103 a) of the devices (101, 102, 103) andthe first surface 104 a of the molding 104 as shown in FIG. 6I. In someembodiments, the RDL 105 is an electrical connection to and/or betweenthe devices (101, 102, 103) and circuitry external to the devices (101,102, 103). The RDL 105 re-routes a path of a circuit from a die pad 101b or conductive structures (102 b, 103 b) to the circuitry external tothe devices (101, 102, 103). In some embodiments, the RDL 105electrically connects with the metallic shield 106. Portions of themetallic shield 106 exposed from the first surface 104 a of the molding104 are contacted with the RDL 105. In some embodiments, a bond pad 115is formed over and electrically connected to the RDL 105. In someembodiments, the bond pad 115 is a land grid array (LGA) pad configuredto be mounted on a print circuit board (PCB). In some embodiments, thebond pad 115 is a ball grid array (BGA) pad configured to receive aconductive bump. In some embodiments, the bond pad 115 is disposed byelectroplating operations or any other suitable operations.

In operation 609, a second surface 104 c (referring to FIG. 6I) of themolding 104 is ground towards the first surface 104 a of the molding 104and the first surfaces (101 a, 102 a, 103 a) of the devices (101, 102,103) to become the second surface 104 c′ as shown in FIG. 6J. In someembodiments, the second surface 104 c is ground to become the secondsurface 104 c′ to expose the metallic shield 106 disposed within themolding 104 and between the devices (101, 102, 103) from the secondsurface 104 c′ of the molding 104. Portions of the metallic shield 106are exposed from the second surface 104 c′ after the grindingoperations.

In operation 610, a metallic coating 107 is disposed on the secondsurface 104 c′ of the molding 104 as shown in FIG. 6K. In someembodiments, the second surface 104 c′ is opposite to the first surface104 a of the molding 104, and the metallic coating 107 covers the secondsurface 104 c′ of the molding 104. In some embodiments, the metalliccoating 107 is contacted with the metallic shield 106 exposed from thesecond surface 104 c′. In some embodiments, the metallic coating 107 iselectrically connected with the metallic shield 106 and/or the RDL 105.In some embodiments, a semiconductor structure 700 is formed. Thesemiconductor structure 700 has similar configuration as thesemiconductor structure 400 as shown in FIG. 4.

In operation 611, the semiconductor structure 700 is singulated as shownin FIG. 6L. In some embodiments, several pieces of the semiconductorstructures 700 are formed simultaneously by operations 601-610. Thesemiconductor structures 700 are horizontally arranged and neighboredwith each other. The molding 104 connects the semiconductor structures700 with each other. The semiconductor structures 700 are separatedalong several scribe line regions 114. Several pieces of thesemiconductor structure 700 as shown in FIG. 6M are singulated by sawingalong the scribe line regions 114. Therefore, several pieces of thesemiconductor structure 700 are produced. In some embodiments, thesemiconductor structures 700 structurally same as each other.

In the present disclosure, an improved semiconductor structure isdisclosed. The semiconductor structure includes several devices, ametallic shield and a molding. The molding is formed by immersionmolding operations, such that the molding could fully encapsulate thedevices and the metallic shield. The metallic shield would not obstructthe formation of the molding during the immersion molding operations.

Furthermore, the molding could support the devices in differentdimensions. Thus, different types of devices could be integrated into asingle module. In addition, a substrate or carrier is not necessary inorder to save manufacturing cost. Further, a sacrificial layer isdisposed on one of the devices, such that a recessed portion of themolding is formed. A pillar or bump is not necessary to be disposed on adie pad of the device.

In some embodiments, a method of manufacturing a semiconductor structureincludes disposing a plurality of devices on a carrier; immersing theplurality of devices into a molding compound to dispose the moldingcompound between the plurality of devices; and removing the carrier fromthe plurality of devices and the molding compound, wherein a firstsurface of the molding compound adjacent to a plurality of activecomponents over the plurality of devices includes a recessed portionrecessed from one of first surfaces of the plurality of devices.

In some embodiments, disposing the plurality of devices includesattaching the first surfaces of the plurality of devices to the carrierby an adhesive. In some embodiments, the method further includesdisposing a sacrificial layer on at least one of the first surfaces ofthe plurality of devices. In some embodiments, the method furtherincludes disposing a metallic shield on the carrier and between theplurality of devices.

In some embodiments, the method further includes grinding a secondsurface of the molding compound to expose a metallic shield disposedwithin the molding compound and between the plurality of devices fromthe second surface of the molding compound. In some embodiments, themethod further includes forming a redistribution layer (RDL) on thefirst surfaces of the plurality of devices and the first surface of themolding compound. In some embodiments, the method further includesdisposing a metallic coating on a second surface of the molding compoundopposite to the first surface of the molding compound.

In some embodiments, a method of manufacturing a semiconductor structureincludes disposing a plurality of devices on a carrier, each of theplurality of devices includes a first surface disposed with an activecomponent; disposing a metallic shield on the carrier and between two ofthe plurality of devices; disposing a molding between the plurality ofdevices and the metallic shield; removing the carrier from the pluralityof devices, the metallic shield and the molding; and disposing an RDLover the first surfaces of the plurality of devices, the metallic shieldand the molding after removing the carrier.

In some embodiments, a first interface between the RDL and the moldingis recessed from and coupled with a second interface between the RDL andthe plurality of devices, and the metallic shield is extended from thefirst surface.

In some embodiments, the method further includes disposing a sacrificiallayer on at least one of the first surfaces of the plurality of devicesbefore disposing the plurality of devices on the carrier. In someembodiments, the method further includes removing the sacrificial layerafter removing the carrier.

In some embodiments, the disposing of the molding between the pluralityof devices and the metallic shield includes immersing the plurality ofdevices and the metallic shield into a molding compound.

In some embodiments, the method further includes grinding a secondsurface of the molding to expose the metallic shield from the secondsurface of the molding. In some embodiments, the method further includesdisposing a metallic coating on the second surface of the molding.

In some embodiments, a method of manufacturing a semiconductor structureincludes disposing a plurality of devices and a metallic shield on acarrier, each of the plurality of devices includes a first surfacedisposed with an active component, and the metallic shield is betweentwo of the plurality of devices; disposing a molding between theplurality of devices and the metallic shield, the molding including afirst surface coupled to the first surfaces of the plurality of devicesand a second surface opposite to the first surface; removing the carrierfrom the plurality of devices, the metallic shield and the molding toexpose the first surfaces of the plurality of devices and the firstsurface of the molding; disposing an RDL over the first surface of theplurality of devices, the metallic shield and the first surface of themolding; and disposing a metallic coating over the second surface of themolding.

In some embodiments, the disposing of the plurality of devices and themetallic shield further includes attaching the first surfaces of theplurality of devices to the carrier by and adhesive; and disposing themetallic shield between the two of the plurality of devices on theadhesive.

In some embodiments, the method further includes grinding the secondsurface of the molding to expose the metallic shield from the secondsurface of the molding.

In some embodiments, the metallic coating is coupled to the metallicshield. In some embodiments, the RDL includes a plurality of conductiveinterconnect structures coupled to the metallic shield. In someembodiments, the method further includes disposing a bond pad over andelectrically connected to the RDL.

The foregoing outlines features of several embodiments so that thoseskilled in the art may better understand the aspects of the presentdisclosure. Those skilled in the art should appreciate that they mayreadily use the present disclosure as a basis for designing or modifyingother processes and structures for carrying out the same purposes and/orachieving the same advantages of the embodiments introduced herein.Those skilled in the art should also realize that such equivalentconstructions do not depart from the spirit and scope of the presentdisclosure, and that they may make various changes, substitutions, andalterations herein without departing from the spirit and scope of thepresent disclosure.

1. A method of manufacturing a semiconductor structure, comprising:disposing a plurality of devices on a carrier, each of the plurality ofdevices including a first surface disposed with an active component;immersing the plurality of devices into a molding compound to disposethe molding compound between the plurality of devices; and removing thecarrier from the plurality of devices and the molding compound, whereina first surface of the molding compound adjacent to a plurality ofactive components disposed on the plurality of devices includes arecessed portion recessed from one of first surfaces of the plurality ofdevices.
 2. The method of claim 1, wherein disposing the plurality ofdevices includes attaching the first surfaces of the plurality ofdevices to the carrier by an adhesive.
 3. The method of claim 1, furthercomprising disposing a sacrificial layer on at least one of the firstsurfaces of the plurality of devices.
 4. The method of claim 1, furthercomprising disposing a metallic shield on the carrier and between theplurality of devices.
 5. The method of claim 1, further comprisinggrinding a second surface of the molding compound to expose a metallicshield disposed within the molding compound and between the plurality ofdevices from the second surface of the molding compound.
 6. The methodof claim 1, further comprising forming a redistribution layer (RDL) onthe first surfaces of the plurality of devices and the first surface ofthe molding compound.
 7. The method of claim 1, further comprisingdisposing a metallic coating on a second surface of the molding compoundopposite to the first surface of the molding compound.
 8. A method ofmanufacturing a semiconductor structure, comprising: disposing aplurality of devices on a carrier, each of the plurality of devicesincludes a first surface disposed with an active component; disposing ametallic shield on the carrier and between two of the plurality ofdevices; disposing a molding between the plurality of devices and themetallic shield; removing the carrier from the plurality of devices, themetallic shield and the molding; and disposing an RDL over the firstsurfaces of the plurality of devices, the metallic shield and themolding after removing the carrier.
 9. The method of claim 8, wherein afirst interface between the RDL and the molding is recessed from andcoupled with a second interface between the RDL and the plurality ofdevices, and the metallic shield is extended from the first interface.10. The method of claim 8, further comprising disposing a sacrificiallayer on at least one of the first surfaces of the plurality of devicesbefore disposing the plurality of devices on the carrier.
 11. The methodof claim 10, further comprising removing the sacrificial layer afterremoving the carrier.
 12. The method of claim 8, wherein the disposingof the molding between the plurality of devices and the metallic shieldcomprises immersing the plurality of device and the metallic shield intoa molding compound.
 13. The method of claim 8, further comprisinggrinding a second surface of the molding to expose the metallic shieldfrom the second surface of the molding.
 14. The method of claim 13,further comprising disposing a metallic coating on the second surface ofthe molding.
 15. A method of manufacturing a semiconductor structure,comprising: disposing a plurality of devices and a metallic shield on acarrier, each of the plurality of devices includes a first surfacedisposed with an active component, and the metallic shield is betweentwo of the plurality of devices; disposing a molding between theplurality of devices and the metallic shield, the molding including afirst surface coupled to the first surfaces of the plurality of deviceand a second surface opposite to the first surface; removing the carrierfrom the plurality of devices, the metallic shield and the molding toexpose the first surfaces of the plurality of devices and the firstsurface of the molding; disposing an RDL over the first surfaces of theplurality of devices, the metallic shield and the first surface of themolding; and disposing a metallic coating over the second surface of themolding.
 16. The method of claim 15, wherein the disposing of theplurality of devices and the metallic shied further comprising:attaching the first surfaces of the plurality of devices to the carrierby an adhesive; and disposing the metallic shield between the two of theplurality of devices on the adhesive.
 17. The method of claim 15,further comprising grinding the second surface of the molding to exposethe metallic shield from the second surface of the molding.
 18. Themethod of claim 15, wherein the metallic coating is coupled to themetallic shield.
 19. The method of claim 15, wherein the RDL comprises aplurality of conductive interconnect structures coupled to the metallicshield.
 20. The method of claim 15, further comprising disposing a bondpad over and electrically connected to the RDL.